Facilities of MNTLab @ DUTH

Infrastructure and Equipment

The Micro and Nano-Technology Lab occupies an area of 240 m2. Equipment for: material fabrication, layers and device characterization, electrochemical cell manufacturing and characterization, are the basic components for its research and educational activities.

Layer and device characterization:

  • Clean Room 45 m2 (class 100-10000)
  • Parameter analyser for I-V and C-V measurements
  • Karlsuss Probe station
  • Quantum efficiency tool for tandem cells
  • Dektak profilometer
  • UV-Vis spectroscopy
  • Differential Thermal Analysis (DTA) system
  • Deep Level Transient Spectroscopy (DLTS)
  • C-V electrochemical profiler
  • Hall measurement tool
  • Set-up for chemical sensing
  • 2x8-channel battery testers
  • Cyclic Voltammetry and Electrochemical impedance spectroscopy
  • Solar simulator

Material and device fabrication:

  • Diffusion- and oxidation ovens for temperatures up to 1100oC
  • Systems for materials growth (Crystal Puller, DC and RF-Sputtering, RTLP-CVD)
  • Evaporators for metal deposition (Al, Au, Au-Pt, Pd, W)
  • Photolithography station and chemical bench for developing alternative materials and structures.
  • Spin coater
  • Electrophoretic Deposition set-up
  • 2-positions Argon Glovebox