Facilities of MNTLab @ DUTH

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Infrastructure and Equipment

The Micro and Nano-Technology Lab occupies an area of 240 m2. Equipment for: material fabrication, layers and device characterization, electrochemical cell manufacturing and characterization, are the basic components for its research and educational activities.

Layer and device characterization:

Clean Room 45 m2 (class 100-10000)
Parameter analyzer for I-V and C-V measurements (Keithley, HP)
Probe station (Karlsuss)
Quantum efficiency tool for tandem cells
Profilometer (Dektak)
UV-Vis spectroscopy
Differential Thermal Analysis (DTA) system
Deep Level Transient Spectroscopy (DLTS)
Hall measurement tool
Set-up for chemical sensing
3x8-channel battery testers (2 Basytec, 1Neware)
Cyclic Voltammetry and Electrochemical impedance spectroscopy (Palmsense 3 & 4)
Solar simulator
FTIR spectroscopy

Material and device fabrication:

Diffusion- and oxidation ovens for temperatures up to 1100^oC
Systems for materials growth (Crystal Puller, DC and RF-Sputtering, RTLP-CVD)
Evaporators for metal deposition (Al, Au, Au-Pt, Pd, W) (Alcatel)
Photolithography station and chemical bench for developing alternative materials and structures (Karlsuss)
Spin coater (Ossila)
Centrifugal equipment
Electrophoretic Deposition set-up
4-hand glovebox (humidity level: 1 ppm, Jacomex) with pre-heating antichamber
Electrode slurry mixer
Planetary Ball Mill (TMAX)
Film Applicator (TMAX)
Hot Rod Roll Press (Calendering) (TMAX)
Pouch cell assembly equipment (pouch case welding and electrolyte filling) (TOB)
Tab welder (TOB)
Electrochemical cell assembly stations (for Swagelok®, coin and pouch cells)