Facilities of MNTLab @ DUTH
Infrastructure and Equipment
The Micro and Nano-Technology Lab occupies an area of 240 m2. Equipment for: material fabrication, layers and device characterization, electrochemical cell manufacturing and characterization, are the basic components for its research and educational activities.
Layer and device characterization:
- Clean Room 45 m2 (class 100-10000)
- Parameter analyzer for I-V and C-V measurements (Keithley, HP)
- Probe station (Karlsuss)
- Quantum efficiency tool for tandem cells
- Profilometer (Dektak)
- UV-Vis spectroscopy
- Differential Thermal Analysis (DTA) system
- Deep Level Transient Spectroscopy (DLTS)
- Hall measurement tool
- Set-up for chemical sensing
- 3x8-channel battery testers (2 Basytec, 1Neware)
- Cyclic Voltammetry and Electrochemical impedance spectroscopy (Palmsense 3 & 4)
- Solar simulator
- FTIR spectroscopy
Material and device fabrication:
- Diffusion- and oxidation ovens for temperatures up to 1100oC
- Systems for materials growth (Crystal Puller, DC and RF-Sputtering, RTLP-CVD)
- Evaporators for metal deposition (Al, Au, Au-Pt, Pd, W) (Alcatel)
- Photolithography station and chemical bench for developing alternative materials and structures (Karlsuss)
- Spin coater (Ossila)
- Centrifugal equipment
- Electrophoretic Deposition set-up
- 4-hand glovebox (humidity level: 1 ppm, Jacomex) with pre-heating antichamber
- Electrode slurry mixer
- Planetary Ball Mill (TMAX)
- Film Applicator (TMAX)
- Hot Rod Roll Press (Calendering) (TMAX)
- Pouch cell assembly equipment (pouch case welding and electrolyte filling) (TOB)
- Tab welder (TOB)
- Electrochemical cell assembly stations (for Swagelok®, coin and pouch cells)



The FAB process equipment
Click HERE to view the equipment.